Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus

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Authors
Verdonck, Patrick; Wang, Cong; Le, Quoc Toan; Souriau, Laurent; Vanstreels, Kris; Krishtab, Mikhail; Baklanov, Mikhaïl
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
120
Title
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus
Publication type
Journal article
Embargo date
9999-12-31
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