Publication:
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus
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1910 since deposited on 2021-10-22
1last week
Acq. date: 2026-02-26
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Views
1910 since deposited on 2021-10-22
1last week
Acq. date: 2026-02-26
Citations