Publication:

Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

Date

2007
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Verdonck, Patrick  
;
De Roest, David  
;
Kaneko, Shinya
;
Caluwaerts, Rudy  
;
Tsuji, Naoto
;
Matsushita, Kiyohiro
;
Kemeling, Nathan  
;
Travaly, Youssef
;
Sprey, Hessel  
;
Schaekers, Marc  
;
Beyer, Gerald  

Journal

Surface and Coatings Technology

Abstract

Description

Statistics

Views

1915 since deposited on 2021-10-16
2last month
Acq. date: 2026-08-10

Citations

Statistics

Views

1915 since deposited on 2021-10-16
2last month
Acq. date: 2026-08-10

Citations