Publication:
Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
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1917 since deposited on 2021-10-16
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Acq. date: 2026-10-05
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Statistics
Views
1917 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-10-05
Citations