Publication:

Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

Date

2007
Journal article
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dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorKaneko, Shinya
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorTsuji, Naoto
dc.contributor.authorMatsushita, Kiyohiro
dc.contributor.authorKemeling, Nathan
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSprey, Hessel
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorKemeling, Nathan
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-16T21:22:18Z
dc.date.available2021-10-16T21:22:18Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13170
dc.source.beginpage9264
dc.source.endpage9268
dc.source.issue22_23
dc.source.journalSurface and Coatings Technology
dc.source.volume201
dc.title

Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

dc.typeJournal article
dspace.entity.typePublication
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