Publication:

Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

Date

2007

Journal article

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Author(s)

Verdonck, Patrick

;

De Roest, David

;

;

Caluwaerts, Rudy

;

;

Matsushita, Kiyohiro

;

Kemeling, Nathan

;

Travaly, Youssef

;

;

Schaekers, Marc

;

Journal

Surface and Coatings Technology

Statistics

1913 since deposited on 2021-10-16

Acq. date: 2026-03-17