Publication:
Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
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1906 since deposited on 2021-10-16
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Acq. date: 2025-10-24
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Views
1906 since deposited on 2021-10-16
406item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations