Publication:

Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

Date

2007
Journal article
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Author(s)

Verdonck, Patrick  
;
De Roest, David  
;
Kaneko, Shinya
;
Caluwaerts, Rudy  
;
Tsuji, Naoto
;
Matsushita, Kiyohiro
;
Kemeling, Nathan  
;
Travaly, Youssef
;
Sprey, Hessel  
;
Schaekers, Marc  
;
Beyer, Gerald  

Journal

Surface and Coatings Technology

Abstract

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1913 since deposited on 2021-10-16
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Acq. date: 2026-02-24

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