Authors

Groven, Benjamin; Claes, Dieter; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Thean, Aaron; Heyns, Marc; Caymax, Matty; Delabie, Annelies

Conference

16th International Conference on Atomic Layer Deposition

Title

Comparative study of the growth behaviour of 2D WS2 by Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), and the impact on the 2D crystal structure

Publication type

Proceedings paper