Publication:

Challenges in uniform etching of Ruthenium

Date

2021
Meeting abstract
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Author(s)

Le, Quoc Toan  
;
Verdonck, Patrick  
;
Pacco, Antoine  
;
Altamirano Sanchez, Efrain  

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Abstract

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2132 since deposited on 2021-10-31
Acq. date: 2026-02-25

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2132 since deposited on 2021-10-31
Acq. date: 2026-02-25

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