Publication:
Challenges in uniform etching of Ruthenium
Date
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.author | Pacco, Antoine | |
| dc.contributor.author | Altamirano Sanchez, Efrain | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.imecauthor | Pacco, Antoine | |
| dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-31T09:23:53Z | |
| dc.date.available | 2021-10-31T09:23:53Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36887 | |
| dc.source.conference | The Surface Preparation and Cleaning Conference (SPCC 2021) | |
| dc.source.conferencedate | 8/06/2021 | |
| dc.source.conferencelocation | Virtual Conference Belgium | |
| dc.title | Challenges in uniform etching of Ruthenium | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |