Publication:
Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
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1897 since deposited on 2021-10-21
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Acq. date: 2026-08-11
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Statistics
Views
1897 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2026-08-11
Citations