Authors

Uedono, Akira; Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Witters, Thomas; Conard, Thierry; Baklanov, Mikhaïl; Van Elshocht, Sven; Oshima, Nagayasu; Suzuki, Ryoichi

ISSN

0021-4922

Issue

10

Journal

Japanese Journal of Applied Physics

Volume

52

Title

Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams

Publication type

Journal article