Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams

dc.contributor.author	Uedono, Akira
dc.contributor.author	Verdonck, Patrick
dc.contributor.author	Delabie, Annelies
dc.contributor.author	Swerts, Johan
dc.contributor.author	Witters, Thomas
dc.contributor.author	Conard, Thierry
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.author	Van Elshocht, Sven
dc.contributor.author	Oshima, Nagayasu
dc.contributor.author	Suzuki, Ryoichi
dc.contributor.imecauthor	Verdonck, Patrick
dc.contributor.imecauthor	Delabie, Annelies
dc.contributor.imecauthor	Swerts, Johan
dc.contributor.imecauthor	Witters, Thomas
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Van Elshocht, Sven
dc.contributor.orcidimec	Verdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimec	Van Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned	2021-10-21T13:00:54Z
dc.date.available	2021-10-21T13:00:54Z
dc.date.issued	2013
dc.identifier.issn	0021-4922
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23202
dc.identifier.url	http://dx.doi.org/10.7567/JJAP.52.106501
dc.source.beginpage	106501
dc.source.issue	10
dc.source.journal	Japanese Journal of Applied Physics
dc.source.volume	52
dc.title	Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
dc.type	Journal article
dspace.entity.type	Publication
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