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Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
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1894 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-12
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Views
1894 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-12
Citations