ALD barrier deposition on porous low-k dielectric materials for interconnects

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Authors
Van Elshocht, Sven; Delabie, Annelies; Dewilde, Sven; Meersschaut, Johan; Swerts, Johan; Tielens, Hilde; Verdonck, Patrick; Witters, Thomas; Vancoille, Eric
Conference
Atomic Layer Deposition Applications 7
Title
ALD barrier deposition on porous low-k dielectric materials for interconnects
Publication type
Proceedings paper
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