Authors

Levrau, Elisabeth; Devloo-Casier, K; Dendooven, Jolien; Verdonck, Patrick; Baklanov, Mikhaïl; Detavernier, Christoph

Conference

Materials for Advanced Metallization - MAM

Title

An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films

Publication type

Meeting abstract

Embargo date

9999-12-31