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An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
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1943 since deposited on 2021-10-21
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Acq. date: 2025-10-25
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1943 since deposited on 2021-10-21
427item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations