Publication:
An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1952 since deposited on 2021-10-21
3last month
Acq. date: 2026-04-30
Citations
Statistics
Views
1952 since deposited on 2021-10-21
3last month
Acq. date: 2026-04-30
Citations