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An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
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1946 since deposited on 2021-10-21
2last month
Acq. date: 2025-12-09
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Metrics
Views
1946 since deposited on 2021-10-21
2last month
Acq. date: 2025-12-09
Citations