Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus

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Authors
Verdonck, Patrick; Wang, Cong; Souriau, Laurent; Vanstreels, Kris; Baklanov, Mikhaïl
Conference
Materials for Advanced Metallization - MAM
Title
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus
Publication type
Meeting abstract
Embargo date
9999-12-31
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