Publication:
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus
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1963 since deposited on 2021-10-21
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Acq. date: 2025-12-10
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1963 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2025-12-10
Citations