Publication:
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus
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1966 since deposited on 2021-10-21
2last month
Acq. date: 2026-08-08
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Statistics
Views
1966 since deposited on 2021-10-21
2last month
Acq. date: 2026-08-08
Citations