Publication:
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus
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1968 since deposited on 2021-10-21
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Acq. date: 2026-09-18
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Statistics
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1968 since deposited on 2021-10-21
2last month
1last week
Acq. date: 2026-09-18
Citations