Browsing by author "Arslan, Esen"

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Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions

Le, Quoc Toan; Arslan, Esen; Rip, Jens; De Coster, Hanne; Verdonck, Patrick; Radisic, Dunja; Schleicher, Filip; Vaesen, Inge; Conard, Thierry; Altamirano Sanchez, Efrain (2023)