dc.contributor.author | Montero Alvarez, Daniel | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Feurprier, Yannick | |
dc.contributor.author | Varela Pedreira, Olalla | |
dc.contributor.author | Oikawa, Noriaki | |
dc.contributor.author | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.author | Batuk, Dmitry | |
dc.contributor.author | Puliyalil, Harinarayanan | |
dc.contributor.author | Versluijs, Janko | |
dc.contributor.author | De Coster, Hanne | |
dc.contributor.author | Bazzazian, Nina | |
dc.contributor.author | Jourdan, Nicolas | |
dc.contributor.author | Kumar, Kaushik | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Park, Seongho | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2024-04-09T08:33:55Z | |
dc.date.available | 2022-11-23T13:52:23Z | |
dc.date.available | 2024-04-09T08:33:55Z | |
dc.date.issued | 2022-06-29 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40771.2 | |
dc.title | Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Montero Alvarez, Daniel | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Feurprier, Yannick | |
dc.contributor.imecauthor | Varela Pedreira, Olalla | |
dc.contributor.imecauthor | Oikawa, Noriaki | |
dc.contributor.imecauthor | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.imecauthor | Batuk, Dmitry | |
dc.contributor.imecauthor | Puliyalil, Harinarayanan | |
dc.contributor.imecauthor | Versluijs, Janko | |
dc.contributor.imecauthor | De Coster, Hanne | |
dc.contributor.imecauthor | Bazzazian, Nina | |
dc.contributor.imecauthor | Jourdan, Nicolas | |
dc.contributor.imecauthor | Kumar, Kaushik | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Park, Seongho | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Montero Alvarez, Daniel::0000-0001-9966-0399 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.contributor.orcidimec | Varela Pedreira, Olalla::0000-0002-2987-1972 | |
dc.contributor.orcidimec | Martinez Alanis, Gerardo Tadeo::0000-0001-5036-0491 | |
dc.contributor.orcidimec | Batuk, Dmitry::0000-0002-6384-6690 | |
dc.contributor.orcidimec | Puliyalil, Harinarayanan::0000-0002-9749-5307 | |
dc.contributor.orcidimec | De Coster, Hanne::0000-0002-5968-7703 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Jourdan, Nicolas::0009-0005-4798-1736 | |
dc.contributor.orcidimec | Murdoch, Gayle::0000-0002-6833-220X | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.date.embargo | 2022-06-27 | |
dc.identifier.doi | 10.1109/IITC52079.2022.9881321 | |
dc.source.peerreview | no | |
dc.subject.discipline | Applied physics | |
dc.source.conference | IITC2022 | |
dc.source.conferencedate | 2022-06-27 | |
dc.source.conferencelocation | San Jose | |
imec.availability | Published - open access | |