Publication:

Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below

Date

2022-06-29
Proceedings Paper
https://doi.org/10.1109/IITC52079.2022.9881321
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 2.12 MB
Accepted version 516.88 KB

Author(s)

Montero Alvarez, Daniel  
;
Vega Gonzalez, Victor  
;
Feurprier, Yannick  
;
Varela Pedreira, Olalla  
;
Oikawa, Noriaki  
;
Martinez Alanis, Gerardo Tadeo  
;
Batuk, Dmitry  
;
Puliyalil, Harinarayanan  
;
Versluijs, Janko  
;
De Coster, Hanne  
;
Bazzazian, Nina  
;
Jourdan, Nicolas  
;
Kumar, Kaushik  
;
Lazzarino, Frederic  
;
Murdoch, Gayle  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

Abstract

Description

Statistics

Downloads

413 since deposited on 2022-11-23
36last month
9last week
Acq. date: 2026-02-26

Views

945 since deposited on 2022-11-23
6last month
1last week
Acq. date: 2026-02-26

Citations

Statistics

Downloads

413 since deposited on 2022-11-23
36last month
9last week
Acq. date: 2026-02-26

Views

945 since deposited on 2022-11-23
6last month
1last week
Acq. date: 2026-02-26

Citations