Publication:

Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below

Date

2022
Proceedings Paper
https://doi.org/10.1109/iitc52079.2022.9881321
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Author(s)

Montero Alvarez, Daniel  
;
Vega Gonzalez, Victor  
;
Feurprier, Yannick  
;
Varela Pedreira, Olalla  
;
Oikawa, Noriaki  
;
Martinez Alanis, Gerardo Tadeo  
;
Batuk, Dmitry  
;
Puliyalil, Harinarayanan  
;
Versluijs, Janko  
;
De Coster, Hanne  
;
Bazzazian, Nina  
;
Jourdan, Nicolas  
;
Kumar, Kaushik  
;
Lazzarino, Frederic  
;
Murdoch, Gayle  
;
Park, Seongho  
;
Tokei, Zsolt  

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738 since deposited on 2022-11-23
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952 since deposited on 2022-11-23
Acq. date: 2026-09-22

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