Exploration of BEOL line-space patterning options at 12nm half-pitch and below

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Authors
Decoster, Stefan; Lazzarino, Frederic; Petersen Barbosa Lima, Lucas; Li, Waikin; Versluijs, Janko; Halder, Sandip; Mallik, Arindam; Murdoch, Gayle
Conference
Advanced Etch Technology for Nanopatterning VII
Title
Exploration of BEOL line-space patterning options at 12nm half-pitch and below
Publication type
Proceedings paper
Embargo date
9999-12-31
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