Publication:
Exploration of BEOL line-space patterning options at 12nm half-pitch and below
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2137 since deposited on 2021-10-25
11last month
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Acq. date: 2026-08-31
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Statistics
Views
2137 since deposited on 2021-10-25
11last month
3last week
Acq. date: 2026-08-31
Citations