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Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks
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Authors
Chang, Xinyue
;
Oprins, Herman
;
Lofrano, Melina
;
Cherman, Vladimir
;
Vermeersch, Bjorn
;
Diaz Fortuny, Javier
;
Park, Seongho
;
Tokei, Zsolt
;
De Wolf, Ingrid
DOI
10.1109/IITC/MAM57687.2023.101548
EISBN
979-8-3503-1097-9
ISSN
2380-632X
Conference
IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
Journal
No
Title
Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks
Publication type
Proceedings paper
Embargo date
2023-05-31
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Version
Item
Date
Summary
3
20.500.12860/42294.3
*
2023-11-29T09:03:08Z
validation by library/open access desk
2
20.500.12860/42294.2
2023-08-09T06:22:42Z
validation by imec author
1
20.500.12860/42294
2023-08-07T17:07:25Z
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