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Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks

dc.contributor.authorChang, Xinyue
dc.contributor.authorOprins, Herman
dc.contributor.authorLofrano, Melina
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorDiaz Fortuny, Javier
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2023-11-29T09:04:54Z
dc.date.available2023-08-07T17:07:25Z
dc.date.available2023-08-09T06:30:20Z
dc.date.available2023-11-29T09:04:54Z
dc.date.issued2023
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001027381700060
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42294.3
dc.sourceWOS
dc.titleCalibrated fast thermal calculation and experimental characterization of advanced BEOL stacks
dc.typeProceedings paper
dc.contributor.imecauthorChang, Xinyue
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDiaz Fortuny, Javier
dc.contributor.orcidimecChang, Xinyue::0000-0003-1875-6132
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecCherman, Vladimir::0000-0002-8068-9236
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecLofrano, Melina::0000-0002-3930-6459
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecDiaz Fortuny, Javier::0000-0002-8186-071X
dc.date.embargo2023-05-31
dc.identifier.doi10.1109/IITC/MAM57687.2023.101548
dc.identifier.eisbn979-8-3503-1097-9
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalNo
imec.availabilityPublished - open access


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320.500.12860/42294.3*2023-11-29T09:03:08Zvalidation by library/open access desk
220.500.12860/42294.22023-08-09T06:22:42Zvalidation by imec author
120.500.12860/422942023-08-07T17:07:25Z

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