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Joule heating investigation for advanced interconnect schemes with airgaps
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Authors
Lofrano, Melina
;
Varela Pedreira, Olalla
;
Ciofi, Ivan
;
Oprins, Herman
;
Park, Seongho
;
Tokei, Zsolt
DOI
10.1109/IITC51362.2021.9537558
EISBN
978-1-7281-7632-1
ISSN
2380-632X
Conference
IEEE International Interconnect Technology Conference (IITC)
Journal
na
Title
Joule heating investigation for advanced interconnect schemes with airgaps
Publication type
Proceedings paper
Embargo date
2022-12-31
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2
20.500.12860/39738.2
*
2023-01-19T15:18:05Z
validation by library/open access desk
1
20.500.12860/39738
2022-05-05T02:17:26Z
*Selected version
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