Publication:

Joule heating investigation for advanced interconnect schemes with airgaps

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537558
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Author(s)

Lofrano, Melina  
;
Varela Pedreira, Olalla  
;
Ciofi, Ivan  
;
Oprins, Herman  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

na

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