Publication:

Joule heating investigation for advanced interconnect schemes with airgaps

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537558
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dc.contributor.authorLofrano, Melina
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorCiofi, Ivan
dc.contributor.authorOprins, Herman
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.date.accessioned2023-01-19T15:19:45Z
dc.date.available2022-05-05T02:17:26Z
dc.date.available2023-01-19T15:19:45Z
dc.date.embargo2022-12-31
dc.date.issued2021
dc.identifier.doi10.1109/IITC51362.2021.9537558
dc.identifier.eisbn978-1-7281-7632-1
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39738
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedateJUL 06-09, 2021
dc.source.conferencelocationKyoto
dc.source.journalna
dc.source.numberofpages3
dc.title

Joule heating investigation for advanced interconnect schemes with airgaps

dc.typeProceedings paper
dspace.entity.typePublication
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