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Conference contributions
Joule heating investigation for advanced interconnect schemes with airgaps
Publication:
Joule heating investigation for advanced interconnect schemes with airgaps
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Date
2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537558
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lofrano, Melina
;
Varela Pedreira, Olalla
;
Ciofi, Ivan
;
Oprins, Herman
;
Park, Seongho
;
Tokei, Zsolt
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na
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since deposited on 2022-05-05
Acq. date: 2025-12-15
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Downloads
241
since deposited on 2022-05-05
14
last month
3
last week
Acq. date: 2025-12-15
Views
1467
since deposited on 2022-05-05
Acq. date: 2025-12-15
Citations