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Exploring W-Cu hybrid dual damascene metallization for future nodes
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Authors
Lei, W.
;
Pethe, S.
;
Hwang, S.
;
Chen, F.
;
Wu, Z.
;
Machillot, J.
;
Cockburn, A.
;
Jansen, A.
;
van der Veen, Marleen
;
Varela Pedreira, Olalla
;
Heylen, Nancy
;
Jourdan, Nicolas
;
Lariviere, Stephane
;
Park, Seongho
;
Struyf, Herbert
;
Tokei, Zsolt
DOI
10.1109/IITC51362.2021.9537410
EISBN
978-1-7281-7632-1
ISSN
2380-632X
Conference
IEEE International Interconnect Technology Conference (IITC)
Journal
na
Title
Exploring W-Cu hybrid dual damascene metallization for future nodes
Publication type
Proceedings paper
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Conference contributions
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Version
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Date
Summary
2
20.500.12860/39744.2
*
2022-05-05T09:04:08Z
validation by library/open access desk
1
20.500.12860/39744
2022-05-05T02:17:28Z
*Selected version
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