Browsing by author "Wu, Z."
Now showing items 1-3 of 3
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Exploring W-Cu hybrid dual damascene metallization for future nodes
Lei, W.; Pethe, S.; Hwang, S.; Chen, F.; Wu, Z.; Machillot, J.; Cockburn, A.; Jansen, A.; van der Veen, Marleen; Varela Pedreira, Olalla; Heylen, Nancy; Jourdan, Nicolas; Lariviere, Stephane; Park, Seongho; Struyf, Herbert; Tokei, Zsolt (2021) -
Novel low thermal budget gate stack solutions for BTI reliability in future Logic Device technologies
Franco, Jacopo; Arimura, Hiroaki; de Marneffe, Jean-Francois; Vandooren, Anne; Ragnarsson, Lars-Ake; Wu, Z.; Claes, D.; Dentoni Litta, Eugenio; Horiguchi, Naoto; Croes, Kristof; Linten, Dimitri; Grasser, T.; Kaczer, Ben (2021) -
Sequential 3D: Key integration challenges and opportunities for advanced semiconductor scaling
Vandooren, Anne; Witters, Liesbeth; Franco, Jacopo; Mallik, Arindam; Parvais, Bertrand; Wu, Z.; Walke, Amey; Deshpande, Paru; Rosseel, Erik; Hikavyy, Andriy; Li, Waikin; Peng, L.; Rassoul, Nouredine; Jamieson, Geraldine; Inoue, Fumihiro; Verbinnen, Greet; Devriendt, Katia; Teugels, Lieve; Heylen, Nancy; Vecchio, Emma; Zheng, T.; Waldron, Niamh; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2018)