Browsing by author "van der Veen, Marleen"
Now showing items 1-20 of 119
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12-EUV layer Surrounding Gate Transistor (SGT) for vertical 6-T SRAM: 5-nm-class technology for ultra-density logic devices
Kim, Min-Soo; Harada, N.; Kikuchi, Yoshiaki; Boemmels, Juergen; Mitard, Jerome; Huynh Bao, Trong; Matagne, Philippe; Tao, Zheng; Li, Waikin; Devriendt, Katia; Ragnarsson, Lars-Ake; Lorant, Christophe; Sebaai, Farid; Porret, Clément; Rosseel, Erik; Dangol, Anish; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Geypen, Jef; Jourdan, Nicolas; Sepulveda Marquez, Alfonso; Puliyalil, Harinarayanan; Jamieson, Geraldine; van der Veen, Marleen; Teugels, Lieve; El-Mekki, Zaid; Altamirano Sanchez, Efrain; Li, Y.; Nakamura, H.; Mocuta, Dan; Matsuoka, F. (2019) -
21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
28nm pitch single exposure patterning readiness by metal oxide resist on 0.33NA EUV Lithography
Kim, Il Hwan; Kim, Insung; Park, Changmin; Lee, Jsiun; Ryu, Koungmin; De Schepper, P.; Doise, J.; Kocsis, M.; De Simone, Danilo; Kljucar, Luka; Das, Poulomi; Blanc, Romuald; Beral, Christophe; Severi, Joren; Vandenbroeck, Nadia; Foubert, Philippe; Charley, Anne-Laure; Oak, Apoorva; Xu, Dongbo; Gillijns, Werner; Mitard, Jerome; Tokei, Zsolt; van der Veen, Marleen; Heylen, Nancy; Teugels, Lieve; Le, Quoc Toan; Schleicher, Filip; Leray, Philippe; Ronse, Kurt (2021) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns
Lee, Se-Won; Kim, Moo-Sung; Lee, Changwon; Ivanov, Sergei; Delabie, Annelies; van der Veen, Marleen (2020) -
Assessment of critical Co electromigration parameters
Varela Pedreira, Olalla; Lofrano, Melina; Zahedmanesh, Houman; Roussel, Philippe; van der Veen, Marleen; Simons, Veerle; Chery, Emmanuel; Ciofi, Ivan; Croes, Kristof (2022) -
Automated voids detection for metal filled trenches with bottom CD of 10nm
Hosseini, Maryam; Martinez Alanis, Gerardo Tadeo; van der Veen, Marleen; Jourdan, Nicolas; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Bandgap opening in oxygen plasma-treated graphene
Nourbakhsh, Amirhasan; Cantoro, Mirco; Vosch, Tom; Pourtois, Geoffrey; Clemente, Francesca; van der Veen, Marleen; Hofkens, Johan; Heyns, Marc; De Gendt, Stefan; Sels, Bert (2010) -
Barrier/liner stacks for scaling the Cu interconnect metallization
van der Veen, Marleen; Jourdan, Nicolas; Vega Gonzalez, Victor; Wilson, Chris; Heylen, Nancy; Varela Pedreira, Olalla; Struyf, Herbert; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt (2016) -
Carbon nanotube growth for high aspect ratio interconnect applications
Xie, Rongsie; Zhang, Can; Chen, Bingan; Zhong, Guofang; Robertson, john; van der Veen, Marleen (2012) -
Carbon nanotube growth for through-silicon via applications
Xie, Rongsie; Zhang, Can; van der Veen, Marleen; Arstila, Kai; Hantschel, Thomas; Chen, Bingan; Zhong, Guofang; Robertson, John (2013) -
Carbon nanotube growth from Langmuir–Blodgett deposited Fe3O4 nanocrystals
van der Veen, Marleen; Cirillo, Marco; Lambert, Karel; Flamée, Stijn; Bodnarchuk, Maryna; Heiss, Wolfgang; De Gendt, Stefan; Hens, Zeger; Vereecken, Philippe (2012) -
Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
Chiodarelli, Nicolo; van der Veen, Marleen; Vereecke, Bart; Cott, Daire; Groeseneken, Guido; Vereecken, Philippe; Huyghebaert, Cedric; Tokei, Zsolt (2011-05) -
Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Catalyzed CVD growth of carbon nanotubes
van der Veen, Marleen; Cirillo, Marco; Chiodarelli, Nicolo; De Henau, Katia; Riskin, Alexander; Van Bael, Marlies; Hens, Zeger; De Gendt, Stefan; Vereecken, Philippe (2009) -
Characterization of carbon nanotubes based vertical interconnects
Vereecke, Bart; van der Veen, Marleen; Barbarin, Yohan; Masahito, Sugiura; Kashiwagi, Yusaku; Cott, Daire; Huyghebaert, Cedric; Tokei, Zsolt (2012) -
Charge transfer effects in graphene-CdSe/ZnS quantum dots composites
Klekachev, Alexander; Asselberghs, Inge; Kuznetsov, Sergey; Cantoro, Mirco; Mun, Jeong Hun; Cho, Byung Jin; Hotta, Jun-ichi; Hofkens, Johan; van der Veen, Marleen; Stesmans, Andre; Heyns, Marc; De Gendt, Stefan (2012-10) -
Charge transfer phenomena in graphene-CdSe/ZnS quantum dots conjugated structures
Klekachev, Alexander; Asselberghs, Inge; Kuznetsov, Sergey; Cantoro, Mirco; Hun Mun, Jeong; Jin Cho, Byung; Hofkens, Johan; van der Veen, Marleen; Hadipour, Afshin; Stesmans, Andre; Heyns, Marc; De Gendt, Stefan (2012) -
Chemical mechanical polishing and planarization of Mn-based barrier/Ru liner films in Cu interconnects for advanced metallization nodes
Sagi, K.V.; Teugels, Lieve; van der Veen, Marleen; Struyf, Herbert; Babu, S.V. (2017) -
Chemical mechanical polishing of chemical vapor deposited Co films with minimal corrosion in the Cu/Co/Mn/SiCOH patterned structures
Sagi, K.V.; Teugels, Lieve; van der Veen, Marleen; Struyf, Herbert; Alety, S.R.; Babu, S.V. (2017)