Authors

Chiodarelli, Nicolo; van der Veen, Marleen; Vereecke, Bart; Cott, Daire; Groeseneken, Guido; Vereecken, Philippe; Huyghebaert, Cedric; Tokei, Zsolt

Conference

IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM

Title

Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact

Publication type

Proceedings paper