Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
Publication:
Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
Date
2011-05
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chiodarelli, Nicolo
;
van der Veen, Marleen
;
Vereecke, Bart
;
Cott, Daire
;
Groeseneken, Guido
;
Vereecken, Philippe
;
Huyghebaert, Cedric
;
Tokei, Zsolt
Journal
Abstract
Description
Metrics
Views
1964
since deposited on 2021-10-19
Acq. date: 2025-12-08
Citations
Metrics
Views
1964
since deposited on 2021-10-19
Acq. date: 2025-12-08
Citations