Carbon nanotube growth for through-silicon via applications

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Authors

Xie, Rongsie; Zhang, Can; van der Veen, Marleen; Arstila, Kai; Hantschel, Thomas; Chen, Bingan; Zhong, Guofang; Robertson, John

ISSN

0957-4484

Issue

12

Journal

Nanotechnology

Volume

24

Title

Carbon nanotube growth for through-silicon via applications

Publication type

Journal article

Embargo date

9999-12-31

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