Carbon nanotube growth for through-silicon via applications

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Author(s)

Xie, Rongsie

;

Zhang, Can

;

van der Veen, Marleen

;

Arstila, Kai

;

Hantschel, Thomas

;

Chen, Bingan

;

Zhong, Guofang

;

Robertson, John

Journal

Nanotechnology

Metrics

1938 since deposited on 2021-10-21

Acq. date: 2025-12-08