Publication:
Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns
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2590 since deposited on 2021-10-28
1last week
Acq. date: 2026-02-26
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Statistics
Views
2590 since deposited on 2021-10-28
1last week
Acq. date: 2026-02-26
Citations