Publication:
Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns
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2573 since deposited on 2021-10-28
8last month
3last week
Acq. date: 2025-12-15
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Metrics
Views
2573 since deposited on 2021-10-28
8last month
3last week
Acq. date: 2025-12-15
Citations