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Automated voids detection for metal filled trenches with bottom CD of 10nm
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Authors
Hosseini, Maryam
;
Martinez Alanis, Gerardo Tadeo
;
van der Veen, Marleen
;
Jourdan, Nicolas
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
DOI
10.1109/IITC51362.2021.9537485
EISBN
978-1-7281-7632-1
ISSN
2380-632X
Conference
IEEE International Interconnect Technology Conference (IITC)
Journal
na
Title
Automated voids detection for metal filled trenches with bottom CD of 10nm
Publication type
Proceedings paper
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Date
Summary
2
20.500.12860/39741.2
*
2022-09-26T09:53:09Z
validation by library/open access desk
1
20.500.12860/39741
2022-05-05T02:17:27Z
*Selected version
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