Browsing by author "Hosseini, Maryam"

Now showing items 1-6 of 6

    • Automated voids detection for metal filled trenches with bottom CD of 10nm 

      Hosseini, Maryam; Martinez Alanis, Gerardo Tadeo; van der Veen, Marleen; Jourdan, Nicolas; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021)

    • First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers 

      Subramanian, Sujith; Hosseini, Maryam; Chiarella, Thomas; Sarkar, Satadru; Schuddinck, Pieter; Chan, BT; Radisic, Dunja; Mannaert, Geert; Hikavyy, Andriy; Rosseel, Erik; Sebaai, Farid; Peter, Antony; Hopf, Toby; Morin, Pierre; Wang, Shouhua; Devriendt, Katia; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Veloso, Anabela; Dentoni Litta, Eugenio; Baudot, Sylvain; Siew, Yong Kong; Zhou, X.; Briggs, Basoene; Capogreco, Elena; Hung, Joey; Koret, R.; Spessot, Alessio; Ryckaert, Julien; Demuynck, Steven; Horiguchi, Naoto; Boemmels, Juergen (2020)

    • Middle-of-line plasma dry etch challenges for Buried Power Rail integration 

      Radisic, Dunja; Veloso, Anabela; Gupta, Anshul; Hosseini, Maryam; Wang, Shiwei; Mertens, Hans; Chan, BT; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Lazzarino, Frederic; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022)

    • Reliability of Barrierless PVD Mo 

      Tierno, Davide; Hosseini, Maryam; van der Veen, Marleen; Dangol, Anish; Croes, Kristof; Demuynck, Steven; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021)

    • Ru as an alternative material for advanced contacts 

      Hosseini, Maryam; Schaekers, Marc; van der Veen, Marleen; Teugels, Lieve; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Yu, Hao; Jourdan, Nicolas; Schleicher, Filip; Debruyn, Haroen; Vanstreels, Kris; Demuynck, Steven; Tokei, Zsolt; Horiguchi, Naoto (2020)

    • Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails 

      Veloso, Anabela; Jourdain, Anne; Radisic, Dunja; Chen, Rongmei; Arutchelvan, Goutham; O'Sullivan, Barry; Arimura, Hiroaki; Stucchi, Michele; De Keersgieter, An; Hosseini, Maryam; Hopf, Toby; D'have, Koen; Wang, Shouhua; Dupuy, Emmanuel; Mannaert, Geert; Vandersmissen, Kevin; Iacovo, Serena; Marien, Philippe; Choudhury, Subhobroto; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Zhou, X.; Gupta, Anshul; Schram, Tom; Briggs, Basoene; Lorant, Christophe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Geypen, Jef; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Soulie, Jean-Philippe; Devriendt, Katia; Chan, BT; Demuynck, Steven; Hiblot, Gaspard; Van der Plas, Geert; Ryckaert, Julien; Beyer, Gerald; Dentoni Litta, Eugenio; Beyne, Eric; Horiguchi, Naoto (2022)