Authors
Radisic, Dunja;
Veloso, Anabela;
Gupta, Anshul;
Hosseini, Maryam;
Wang, Shiwei;
Mertens, Hans;
Chan, BT;
Batuk, Dmitry;
Martinez Alanis, Gerardo Tadeo;
Lazzarino, Frederic;
Dentoni Litta, Eugenio;
Horiguchi, Naoto
EISBN
978-1-5106-4988-0
ISBN
978-1-5106-4987-3
ISSN
0277-786X
Conference
Conference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference
Journal
Proceedings of SPIE
Volume
12056
Title
Middle-of-line plasma dry etch challenges for Buried Power Rail integration
Publication type
Proceedings paper