Publication:

Automated voids detection for metal filled trenches with bottom CD of 10nm

Date

2021

Proceedings Paper

https://doi.org/10.1109/IITC51362.2021.9537485

Simple item page Full metadata Statistics

Author(s)

Hosseini, Maryam

;

Martinez Alanis, Gerardo Tadeo

;

van der Veen, Marleen

;

Jourdan, Nicolas

;

Dentoni Litta, Eugenio

;

Horiguchi, Naoto

Journal

na

Metrics

1584 since deposited on 2022-05-05

Acq. date: 2025-12-16