Publication:

Automated voids detection for metal filled trenches with bottom CD of 10nm

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537485
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Author(s)

Hosseini, Maryam  
;
Martinez Alanis, Gerardo Tadeo  
;
van der Veen, Marleen  
;
Jourdan, Nicolas  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  

Journal

na

Abstract

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