Publication:

Automated voids detection for metal filled trenches with bottom CD of 10nm

Date

2021

Proceedings Paper

https://doi.org/10.1109/iitc51362.2021.9537485

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Author(s)

Hosseini, Maryam

;

Martinez Alanis, Gerardo Tadeo

;

van der Veen, Marleen

;

Jourdan, Nicolas

;

Dentoni Litta, Eugenio

;

Horiguchi, Naoto

Journal

na

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Acq. date: 2026-08-09