Publication:
Automated voids detection for metal filled trenches with bottom CD of 10nm
| dc.contributor.author | Hosseini, Maryam | |
| dc.contributor.author | Martinez Alanis, Gerardo Tadeo | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Jourdan, Nicolas | |
| dc.contributor.author | Dentoni Litta, Eugenio | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Hosseini, Maryam | |
| dc.contributor.imecauthor | Martinez Alanis, Gerardo Tadeo | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Jourdan, Nicolas | |
| dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.contributor.orcidimec | Hosseini, Maryam::0000-0002-0210-4095 | |
| dc.contributor.orcidimec | Martinez Alanis, Gerardo Tadeo::0000-0001-5036-0491 | |
| dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
| dc.date.accessioned | 2022-09-26T09:54:06Z | |
| dc.date.available | 2022-05-05T02:17:27Z | |
| dc.date.available | 2022-09-26T09:54:06Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IITC51362.2021.9537485 | |
| dc.identifier.eisbn | 978-1-7281-7632-1 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39741 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
| dc.source.conferencedate | JUL 06-09, 2021 | |
| dc.source.conferencelocation | Kyoto | |
| dc.source.journal | na | |
| dc.source.numberofpages | 3 | |
| dc.title | Automated voids detection for metal filled trenches with bottom CD of 10nm | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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