Browsing by author "Chen, F."
Now showing items 1-3 of 3
-
Experimental verification of a model based decomposition method for double dipole lithography
Eurlings, M.; Hsu, S.D.; Hendrickx, Eric; op 't Root, W.; Laidig, T.L.; Chiou, T.B.; Chen, A.; Chen, F.; Vandenberghe, Geert; Finders, J. (2004) -
Exploring W-Cu hybrid dual damascene metallization for future nodes
Lei, W.; Pethe, S.; Hwang, S.; Chen, F.; Wu, Z.; Machillot, J.; Cockburn, A.; Jansen, A.; van der Veen, Marleen; Varela Pedreira, Olalla; Heylen, Nancy; Jourdan, Nicolas; Lariviere, Stephane; Park, Seongho; Struyf, Herbert; Tokei, Zsolt (2021) -
Gray bar masking: fabrication and imaging for 193 nm
Smith, Bruce; Vandenberghe, Geert; Martin, P. W.; Rack, P.; Hsu, S.; Chen, F. (2001)