Browsing by author "Wu, Chen"

BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP

Hermans, Yannick; Wu, Chen; Buccheri, Nunzio; Schleicher, Filip; Versluijs, Janko; Montero Alvarez, Daniel; Dey, Bappaditya; Wong, Patrick; Rincon Delgadillo, Paulina; Park, Seongho; Tokei, Zsolt; Leray, Philippe; Halder, Sandip (2023-04-28)

Cobalt and Ruthenium drift in ultra-thin oxides

Tierno, Davide; Varela Pedreira, Olalla; Wu, Chen; Jourdan, Nicolas; Kljucar, Luka; Tokei, Zsolt; Croes, Kristof (2019)

Considering percolation path growth in low-k dielectric TDDB measurements

Wu, Chen; Li, Yunlong; Tokei, Zsolt; Croes, Kristof (2017)

Contact module at dense gate pitch technology challenges

Demuynck, Steven; Mao, Ming; Kunnen, Eddy; Versluijs, Janko; Croes, Kristof; Wu, Chen; Schaekers, Marc; Peter, Antony; Kauerauf, Thomas; Teugels, Lieve; Boemmels, Juergen (2014)

Contactless fault isolation of ultra low k dielectrics in soft breakdown condition

Herfurth, Norbert; Wu, Chen; De Wolf, Ingrid; Croes, Kristof; Boit, Christian (2018)

Correlation between field dependent electrical conduction and dielectric breakdown in a SiOCH based low-k (k=2.0) dielectric

Wu, Chen; Li, Yunlong; Barbarin, Yohan; Ciofi, Ivan; Croes, Kristof; Boemmels, Juergen; De Wolf, Ingrid; Tokei, Zsolt (2013)

Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials

Wu, Chen; Li, Yunlong; Lesniewska, Alicja; Varela Pedreira, Olalla; de Marneffe, Jean-Francois; Ciofi, Ivan; Verdonck, Patrick; Baklanov, Mikhaïl; Boemmels, Juergen; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof (2015)

Current understanding of BEOL TDDB lifetime models

Croes, Kristof; Wu, Chen; Kocaay, Deniz; Li, Yunlong; Roussel, Philippe; Boemmels, Juergen; Tokei, Zsolt (2015)

Dielectric reliability of highly scaled through silicon via for wafer level 3D-SoC applications

Li, Yunlong; Van Huylenbroeck, Stefaan; De Vos, Joeri; Wu, Chen; Stucchi, Michele; Croes, Kristof; Van der Plas, Geert; Beyer, Gerald; Beyne, Eric (2018)

Effect of pore structure of nanometer scale porous films on the measured elastic modulus

Vanstreels, Kris; Wu, Chen; Gonzalez, Mario; Schneider, Dieter; Gidley, David; Verdonck, Patrick; Baklanov, Mikhaïl (2013)

Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films

Vanstreels, Kris; Wu, Chen; Gonzalez, Mario; Verdonck, Patrick; Martini, Roberto; Schneider, Dieter; Baklanov, Mikhaïl (2012)

Electrical reliability challenges of advanced low-k dielectrics

Wu, Chen; Li, Yunlong; Baklanov, Mikhaïl; Croes, Kristof (2015)

Electrical reliability challenges of advanced low-k dielectrics

Wu, Chen; Li, Yunlong; Baklanov, Mikhaïl; Croes, Kristof (2016)

Establishing the relationship between low-k dielectric properties and intrinsic conduction and degradation mechanisms

Wu, Chen; Li, Yunlong; Croes, Kristof (2017)

Extreme contact shrink for back end of line connectivity

Schleicher, Filip; Paolillo, Sara; Decoster, Stefan; Wu, Chen; Vega Gonzalez, Victor; Hasan, Mahmudul; Beral, Christophe; Lazzarino, Frederic (2022-05-10)

Hydrogen outgassing induced liner barrier reliability degradation in through silicon via's

Li, Yunlong; Oba, Yoshiyuki; Wu, Chen; Van Huylenbroeck, Stefaan; Van Besien, Els; Vereecke, Guy; Stucchi, Michele; De Wolf, Ingrid; Beyer, Gerald; Beyne, Eric; Croes, Kristof (2014)

Impact of Cu TSVs on BEOL metal and dielectric reliability

Li, Yunlong; Croes, Kristof; Nabiollahi, Nabi; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Velenis, Dimitrios; Bender, Hugo; Jourdain, Anne; Pantouvaki, Marianna; Stucchi, Michele; Vanstreels, Kris; Van De Peer, Myriam; De Messemaeker, Joke; Wu, Chen; Beyer, Gerald; De Wolf, Ingrid; Beyne, Eric (2014)

Impact of Mn-based barriers on dielectric breakdown voltage and capacitance

Lesniewska, Alicja; Wu, Chen; Jourdan, Nicolas; Briggs, Basoene; Boemmels, Juergen; Tokei, Zsolt; Croes, Kristof (2016)

Improving uniformity of 3-level High Aspect Ratio Supervias

Montero Alvarez, Daniel; Marien, Philippe; Hermans, Yannick; Vega Gonzalez, Victor; Feurprier, Y.; Oikawa, N.; Buccheri, Nunzio; Wu, Chen; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Puliyalil, Harinarayanan; Decoster, Stefan; Kumar, K.; Lazzarino, Frederic; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2023)

In Depth Understanding of Low-k Dielectric Reliability in Interconnect Systems

Wu, Chen (2016-06)