Impact of Cu TSVs on BEOL metal and dielectric reliability

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Authors
Li, Yunlong; Croes, Kristof; Nabiollahi, Nabi; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Velenis, Dimitrios; Bender, Hugo; Jourdain, Anne; Pantouvaki, Marianna; Stucchi, Michele; Vanstreels, Kris; Van De Peer, Myriam; De Messemaeker, Joke; Wu, Chen; Beyer, Gerald; De Wolf, Ingrid; Beyne, Eric
Conference
International Reliability Physics Symposium - IRPS
Title
Impact of Cu TSVs on BEOL metal and dielectric reliability
Publication type
Proceedings paper
Embargo date
9999-12-31
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