Publication:

Impact of Cu TSVs on BEOL metal and dielectric reliability

Date

2014

Proceedings Paper

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Files

27249.pdf 1.98 MB

Author(s)

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Nabiollahi, Nabi

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Van Huylenbroeck, Stefaan

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Gonzalez, Mario

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Velenis, Dimitrios

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Pantouvaki, Marianna

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Stucchi, Michele

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Vanstreels, Kris

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Van De Peer, Myriam

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De Messemaeker, Joke

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De Wolf, Ingrid

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Metrics

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Acq. date: 2025-12-13