Impact of Mn-based barriers on dielectric breakdown voltage and capacitance

Thumbnail
View/open
Metadata
Show full item record
Authors
Lesniewska, Alicja; Wu, Chen; Jourdan, Nicolas; Briggs, Basoene; Boemmels, Juergen; Tokei, Zsolt; Croes, Kristof
Conference
Materials for Advanced Metallization Conference - MAM
Title
Impact of Mn-based barriers on dielectric breakdown voltage and capacitance
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections