Contactless fault isolation of ultra low k dielectrics in soft breakdown condition

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Authors
Herfurth, Norbert; Wu, Chen; De Wolf, Ingrid; Croes, Kristof; Boit, Christian
Conference
International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA
Title
Contactless fault isolation of ultra low k dielectrics in soft breakdown condition
Publication type
Proceedings paper
Embargo date
9999-12-31
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