Cobalt and Ruthenium drift in ultra-thin oxides

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Authors

Tierno, Davide; Varela Pedreira, Olalla; Wu, Chen; Jourdan, Nicolas; Kljucar, Luka; Tokei, Zsolt; Croes, Kristof

ISSN

0026-2714

Journal

Microelectronics Reliability

Volume

100-101

Title

Cobalt and Ruthenium drift in ultra-thin oxides

Publication type

Journal article

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