Publication:

Hydrogen outgassing induced liner barrier reliability degradation in through silicon via's

Date

2014

Journal article

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Author(s)

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Van Huylenbroeck, Stefaan

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Van Besien, Els

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Stucchi, Michele

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De Wolf, Ingrid

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Journal

Applied Physics Letters

Metrics

1952 since deposited on 2021-10-22

Acq. date: 2026-01-08